Advanced control and testing: research on the new theories and new methods for nano-scale testing and control. Integrated design of micro-nano electromechanical system: research on the theory and method for micro-nano system design taking into consideration the surface effect and size effect under micro-nano scale. Development and manufacturing of micro-nano devices: Micro-nano research is combined with actual projects to develop micro-nano electromechanical systems and devices with certain functions, which are applied to biological medicine, communications, automobile, environmental protection, etc.